Autori: Carmen Moldovan, Eduard Franti, Lavinia G. Hinescu, Mihail Hinescu, Victor Voicu, Lucian Milea, Teofil Todorescu, Cornel Tabarasanu, Cristian Lupu

Editorial: WSAES TRANSACTIONS ON ELECTRONICS, Issue 2, Vol. 3, p.97-101, 2006.

Rezumat:

The paper presents the layout, the technological steps and the measurement results for an interdigital integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate.
The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as phthalocyanine derivatives deposition technique. Considering the different sensitivities of phthalocyanines derivatives, we obtained different gas sensors. The copper phthalocyanine (Cu Pc), 20 nm thickness, and nickel phthalocyanine (Ni Pc), 20 nm thickness have been investigated for NOx detection. The measurement of sensors for NOx detection will be presented as concentration versus impedance.
The microsensors testing structures deposited with phthalocyanines were investigated by impedance measurements in a vacuum chamber controlled by a gas analyzer.
The measurements were made at room temperature but a medium temperature is applied (<2000C) after measurement, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption. The sensors can be used for biomedical applications or for pollution monitoring.

Cuvinte cheie: phthalocyanine derivatives, integrated gas sensor

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