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The influence of post-deposition treatment on some physical properties of Sb2S3 thin films

Domenii publicaţii > Fizica + Tipuri publicaţii > Articol în revistã ştiinţificã

Autori: N. Þigau, C. Gheorghies, G. I. Rusu, S. Condurache-Bota

Editorial: Journal of Non-Crystalline Solids, 351 (12-13), p.987-992, 2005.

Rezumat:

The influence of a thermal treatment for 30 min from T = 300 K to T = 473 K, on the structural, electrical and optical properties of antimony trisulfide (Sb2S3) thin films has been investigated.
The thin films deposited on a glass substrate by thermal vacuum evaporation at a substrate temperature
TS = 300 K have amorphous structure, but after annealing they change to a polycrystalline structure, while those deposited at TS = 498 K have polycrystalline structure both before and after the
heat-treatment.
The structural modifications have a strong influence on the electrical and optical properties of the Sb2S3 thin films.

Cuvinte cheie: depunere prin evaporare termica in vid, semiconductori, difractie de radiatii X // thermal vacuum deposition, semiconductors, XRD