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Accurate calibration of grating pitch

Domenii publicaţii > Fizica + Tipuri publicaţii > Articol în revistã ştiinţificã

Autori: D. Apostol, P.C. Logofatu, S. Florea, V. Damian, I. Iordache, M. Bojan

Editorial: M. A. Popescu, J. Optoelectron. Adv. M., 10, p.352-355, 2008.

Rezumat:

A current issue insufficiently addressed in nanometrology is the accurate characterization of calibrators with nanoscale
features. Gratings are such calibrators and their pitch is one of the features that are used for calibration purposes. In this
article the classic method of determining the gratings pitch from the measurement of the angular position of the refracted
orders is used. To ensure traceability one has to relate the measurements to the wavelength of a frequency stabilized laser
and that can be accomplished by using such a laser as the light source in the experiment. The method is shown to have
adequate accuracy for nanometrological needs. A salient feature of the method revealed by error analysis is the fact that
the absolute estimation error decreases with the pitch, making the method especially suited for nanometrology. The modern
use of the method rather than the method itself is the element of novelty here, of a technological rather than scientific
nature.

Cuvinte cheie: perioada retelelor de difractie, calibrare laterala, traseabilitate, ordine de difractie // Gratings pitch, Lateral calibration, Traceability, Diffraction orders

URL: http://inoe.inoe.ro/joam/index.php?option=magazine&op=view&idu=1202&catid=23