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Mechanical and decorative properties of ZrOx thin films

Domenii publicaţii > Stiinte ingineresti + Tipuri publicaţii > Articol în revistã ştiinţificã

Autori: M. Apreutesei, R. Arvinte, D. Constantin, O.C. Andrei, D. Munteanu

Editorial: INOE, Journal of Optoelectronics and Advanced Materials, Vol. 13, Issue 7, p.897-901, 2011.


Within the frame of this work is zirconium oxide – ZrOx decorative thin films were deposited by reactive magnetron
sputtering. These films have been characterized in terms of some proprieties as films colour, mechanical properties,
thickness and composition, taking into account the influence of certain deposition parameters such as: reactive gas flow
(O2) and deposition time. Regarding the composition, the obtained films are characterized by two zones, one rich in Zr
which leads to various metallic colours of the films and the second zone rich in oxygen, which lead to some interference colour of the films. The hardness increase with the increase of reactive gas flow until 15 GPa for ZrOx coatings deposited at
200 Celsius degrees.

Cuvinte cheie: Zirconium oxide, Reactive Sputtering, Composition, Properties