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Ellipsometric arrangement for thin films control

Domenii publicaţii > Fizica + Tipuri publicaţii > Articol în revistã ştiinţificã

Autori: A. Beldiceanu, A. Rizea

Editorial: Proceedings of the Romanian Academy, series A, Volume 9, Number 2, 2008.


An ellipsometric experimental set up of PSA type with an extinction factor E.F.= 10-5, inspired from the Gaertner’s L119 and a powerful BASIC software for the theoretical calculus of the ellipsometric parameters  and , including original practical solutions, were developed. Encouraging results were obtained in applying the simple ellipsometric method of azimuths to determine the optical constants: refractive index n, absorption index k and geometrical thickness d, for the polished film on BK7 and quartz glass substrates, with this new optoelectronic device.

Cuvinte cheie: Ellipsometry, Polishing film, Optical constants, Thin films