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Nanomechanical Properties of Amorphous FeCuNbSiB Thin Films Deposited by HiPIMS

Domenii publicaţii > Stiinte ingineresti + Tipuri publicaţii > Articol în revistã ştiinţificã

Autori: Ioana-Laura Velicu, Maria Neagu, Lucian Costinescu, Daniel Munteanu, Elias P. Koumoulos, and Costas A. Charitidis

Editorial: ASP, SENSOR LETTERS, Vol. 11, no. 10, p.1925-1930, 2013.

Rezumat:

The mechanical properties (Young’s modulus, hardness, film-substrate adhesion and friction coefficient) of amorphous Fe735Cu1Nb3Si155B7 thin films deposited by HiPIMS on glass substrates were
investigated by using nanoindentation and nanoscratch techniques. The dependence of hardness
and Young’s modulus on the indentation depth showed that the system is hard-soft. Composite
hardness, effective Young’s modulus and friction coefficient of the films are about 9 GPa, 146 GPa
and 0.11 respectively.

Cuvinte cheie: Magnetic Thin Films, Sputtering, Nanoindentation, Hardness, Young’s Modulus.