MOSFET process optimization and characteristics extraction
TCAD software needs equipment input settings and models to create the process enviromment for process and device simulation tools like TSUPREM4 and MEDICI. After optimization the next step is the circuit simulation and design using software packages like SPICE. First using design of experiments-DOE and response surface modelling-RSM technique we optimise the MOSFET characteristics and then we compare the transfer characteristics of n-type MOSFET,
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