Tantalum oxynitride (TaNxOy) thin films were produced by magnetron sputtering. This work analyzes and compares the mechanical properties and the wear behavior of the films, taking into account the differences promoted by changes in composition and structure, caused by the variation of the partial pressure of the reactive gases (P(N2+O2)) and by the polarization of the substrate holder. Besides the change in composition, the variation of P(N2+O2)

The mechanical properties (Young’s modulus, hardness, film-substrate adhesion and friction coefficient) of amorphous Fe73
5Cu1Nb3Si15
5B7 thin films deposited by HiPIMS on glass substrates were investigated by using nanoindentation and nanoscratch techniques. The dependence of hardness and Young’s modulus on the indentation depth showed that the system is hard-soft. Composite hardness, effective Young’s modulus and friction coefficient of the