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Nano-metrology of macro-systems

Domenii publicaţii > Fizica + Tipuri publicaţii > Articol în volumul unei conferinţe

Autori: F. Garoi, D. Apostol, P. Schiopu, P. C. Logofatu and V. Damian

Editorial: Proc. SPIE of Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 7297, 72971G, 2009.


In this paper, a small scale laboratory strainmeter for measuring relative strains is presented. The instrument is a high resolution homodyne interferometer with polarizing optics and special designed electronics for analyzing the output signal of the interferometer. Resolution of the order of λ/8 is obtained in the first instance, with the possibility of improvement by electronic means. Measurement range could vary from microns in the case of earth strains to meters in the case of industrial applications.

Cuvinte cheie: interferometrie laser, nano-metrologie, masurare traseabila // laser interferometry, nano-metrology, traceable measurement