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The influence of oxygen flow during deposition on the structural, mechanical and tribological properties of titanium oxide magnetron sputtered thin films

Domenii publicaţii > Stiinte ingineresti + Tipuri publicaţii > Articol în revistã ştiinţificã

Autori: D. Constantin, D. Munteanu, C. Moura, L. Cunha

Editorial: Journal of Optoelectronics and Advanced Materials, 14, p.964-970, 2012.


This work reports on the study of mechanical and tribological properties of titanium oxide films produced by direct current
reactive magnetron sputtering. The mechanical and tribological properties of the deposited coatings were analyzed as
function of the oxygen flow rate used during the deposition process and were correlated with the structural aspects. The
structural characterization results reveal a dependence of the film texture on the oxygen flow rate. The gradual increasing of
oxygen flow bring the TiOx compound first in a crystalline structure variant (TiO2 – anatase preferential growth) followed
further by a significant loss in crystallinity. Considering the same variation of oxygen, the mechanical properties of the films(hardness, Young modulus and adherence) generally become better in the amorphous region while the friction coefficient decreased.

Cuvinte cheie: Titanium oxide, Sputtering, Structure, Hardness, Friction, Wear