We achieved parallel nanoscale patterning of ferroelectric complex oxides by pulsed laser deposition through a nanostencil (i.e., through a pattern of apertures in a thin free-standing membrane). Ordered arrays of nanostructured barium titanate (BaTiO3) were obtained onto different substrates in a single deposition step, at room temperature, replicating accurately the aperture patterns in the stencil membrane. After a postdeposition annealing treatment,

An overview of non-conventional methods being used for micro- and nanopatterning of electroceramics is given, including various top-down and bottom-up approaches. Within the top-down approach, focussed ion beam patterning, electron-beam direct writing, nanoimprint lithography, and other next-generation lithography techniques are considered, whereas several physical and chemical self-patterning routes are described for the bottom-up approach. Also

(Introduction) The piezoresponse technique is based on the detection of local vibrations of a cantilever induced by a testing AC signal applied between the conductive tip of the scanning force microscope (SFM) and the bottom electrode of a ferroelectric sample. The cantilever vibrations are converted into an electrical signal by the position sensitive detector of the SFM and extracted from the global deflection signal using a standard lock-in technique.