Autori: C. MOLDOVAN, R. IOSUB, C. BOSCORNEA, L. HINESCU, V. VOICU, M. HINESCU, M. ROBU, M. NISULESCU, M. ION

Editorial: Editura Academiei Romane, p.pp.182-191, 2009.

Rezumat:

The paper presents the layout and the technological steps for an interdigitally
integrated capacitor used for gases detection. Silicon micromachining technology
is applied for manufacturing the sensor substrate.
The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes
layers technique). Many solutions were found as phthalocyanine derivatives deposition
technique. Considering the different sensitivities of phthalocyanines derivatives, we obtained
different gas sensors. The copper phthalocyanine (Cu Pc) and nickel phthalocyanine
(Ni Pc) have been investigated for NOx detection. The measurement of sensors for
NOx and NH3 detection will be presented as concentration versus impedance.
The microsensors testing structures deposited with phthalocyanines were investigated
by impedance measurements in a vacuum chamber controlled by a gas analyzer.
The measurements were made at room temperature but a medium temperature is
applied (<200°C) after measurem ent, for cleaning the material in order to reuse the sensor. The sensor is integrated, MOS compatible, cheap, easy to be used and has a low power consumption.

Cuvinte cheie: Integated Microsensors, Nitric Oxides Detection, Biomedical and Environmental Applications

URL: http://www.nano-link.net/mne/volume14/mne14.PDF