The growing interest in the production of electronic devices are able to detect very small amounts of cellular second-messengers as NO or for monitoring gases as NO2, O2, CO2, Cl2 or other toxic gases. The metal-complex tetraizoindoles (metal phthalocyanines, MePcs) were previously shown as potential sensor materials for nitrogen oxide-sensing devices. The synthesis of nickel phthalocyanines (NiPcs), copper polyphthalocyanines (CuPcs) and aliphatic

The paper presents the layout, the technological steps and the measurement results for an interdigital integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as phthalocyanine derivatives deposition technique. Considering the different sensitivities

The paper presents the layout and the technological steps for an interdigitated integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by evaporation technique under high vacuum. The phthalocyanine derivatives are obtained by the same deposition technique. Considering the different sensitivities of phthalocyanines derivatives,