Tantalum oxynitride (TaNxOy) thin films were produced by magnetron sputtering. This work analyzes and compares the mechanical properties and the wear behavior of the films, taking into account the differences promoted by changes in composition and structure, caused by the variation of the partial pressure of the reactive gases (P(N2+O2)) and by the polarization of the substrate holder. Besides the change in composition, the variation of P(N2+O2)

This work reports on the study of mechanical and tribological properties of titanium oxide films produced by direct current reactive magnetron sputtering. The mechanical and tribological properties of the deposited coatings were analyzed as function of the oxygen flow rate used during the deposition process and were correlated with the structural aspects. The structural characterization results reveal a dependence of the film texture on the oxygen

The present paper reports on the preparation and characterization of DC reactive magnetron sputtered Ag:TiO2 nanocomposite coatings, with a silver content of about 8 at.% (average estimation). The asdeposited samples were subjected to annealing, in a protective atmosphere, at temperatures ranging from 200 to 800 .C. Morphology, structure, hardness and friction behaviour were characterised after each heat treatment. The cross-sections of the films

Within the frame of this work is zirconium oxide - ZrOx decorative thin films were deposited by reactive magnetron sputtering. These films have been characterized in terms of some proprieties as films colour, mechanical properties, thickness and composition, taking into account the influence of certain deposition parameters such as: reactive gas flow (O2) and deposition time. Regarding the composition, the obtained films are characterized by two

Metallic oxynitrides have attracted the attention of several researchers in the last decade due to their versatile properties. Through the addition of a small amount of oxygen into a transition metal nitride film, the material’s bonding states between ionic and covalent types can be tailored, thus opening a wide range of electrical, optical, mechanical and tribological responses. Among the oxynitrides, chromium oxynitride (CrNxOy) has many interesting

Reactive magnetron sputtering was used to obtain dark Ti(C,O,N) decorative coatings onto high speed steel. From a crystallographic point of view, depending by the amount of (N+O) mixture, the obtained films could be divided in two major regions: the first one with a predominant fcc crystallographic structure (for low amounts of (N+O)), and the second one containing films with amorphous structures. The best results for friction coefficient and wear

Ti–Si–C thin films were deposited onto silicon, stainless steel and high-speed steel substrates by magnetron sputtering, using different chamber configurations. The composition of the produced films was obtained by Electron Probe Micro-Analysis (EPMA) and the structure by X-ray diffraction(XRD). The hardness and residual stresses were obtained by depth-sensing indentation and substrate deflection measurements (using Stoney’s equation), respectively.

Within the frame of this work, low temperature Ti–Si–C films were deposited on high-speed steel and stainless steel substrates by combined dc/rf magnetron co-sputtering. Composition analysis revealed the existence of two distinct regions: (i) a silicon doped sub-stoichiometric titanium carbide zone and (ii) a titanium rich zone. Structural analysis confirmed the different nature of the prepared films within each of the two zones. The residual