Integrated Sensor For Gas Detection Based on Phtalocyanine Derivatives
The paper presents the layout, the technological steps and the measurement results for an interdigital integrated capacitor used for gases detection. Silicon micromachining technology is applied for manufacturing the sensor substrate. The sensitive layer used is phthalocyanine (Pc) deposed by EDL (evaporated dyes layers technique). Many solutions were found as phthalocyanine derivatives deposition technique. Considering the different sensitivities
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